Chalcogen doping of silicon via intense femtosecond-laser irradiation
Publication information:
Sheehy, Tull, Friend, Mazur. Chalcogen doping of silicon via intense femtosecond-laser irradiation. Materials Science and … 2007.
Abstract
... b Division of Engineering and Applied Sciences, Harvard University, 9 Oxford Street, Cambridge, MA 02138, United ... Dopant element, Bulk diffusivity in c -Si at T = 775 K (cm 2 s −1 ... Eric Mazur and Cynthia M. Friend supervised the research and contributed to the development of ...