Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask

Publication information:

Younkin, Mazur, Sheehy, Friend. Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask. Applied Physics Letters. 2003.

Abstract

... and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138 M. Sheehy and CM Friend Department of ... This work was supported by the Harvard MRSEC NSF/ DMR-98-09363 and the Department of ... 3 T.-H. Her, RJ Finlay, C . Wu, S. Deliwala, and E. Mazur, Appl. ...