Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses
Publication information:
Mazur, Levinson, Friend. Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses. Journal of Applied . 2003.
Abstract
... and Applied Science, 9 Oxford Street, Cambridge, Massachusetts, 02138 JA Levinson and CM Friend Harvard University, Department ... a)Electronic mail: mazur@physics. harvard .edu ... of conical silicon microstructures formed in a background gas of (a) SF6 , (b) Cl2 , ( c ) N2 , and ...