Laser-Assisted Deposition of Fe and W: Photodecomposition of Fe (CO) 5, and W (CO) 6 on Si (111)-(7× 7)

Publication information:

Swanson, Friend, Chabal. Laser-Assisted Deposition of Fe and W: Photodecomposition of Fe (CO) 5, and W (CO) 6 on Si (111)-(7× 7). MRS Proceedings. 1987.

Abstract

... Jon R. Swanson, CM Friend and YJ Chabal * Harvard University, Dept. ... this work was supported by the NSF (#CHE-83-09455) and (#CHE-84-51307) and the Harvard University Materials ... The C -0 stretching region obtained after: a) exposure of the Si(111)- (7x7) surface to 0.5 L ...